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Solutions For Whole Set Of PVD Coating Machine Fault (Created originally by Foxin Vacuum, please indicate source if reprint)

2018-04-20

Fault Phenomenon

Cause

Solution

Rough valve can not be opened

Compressed air pressure is enough or not

Pressure should be 0.4-0.6MPa

Electromagnetic directional valve of rough valve is not working

Refer to fault phenomenon 2

Overtravel-limit switch of high vacuum valve is not compacted

Adjust switch and upper cover plate to suitable place

Electromagnetic directional valve is not working

No actuation with electricity

Change coil or whole valve

Working room temperature is low

Temperature should be higher than 5℃

Valve body has block

Clean valve body and add pump oil

Air source pressure is not enough

Pressure should be 0.4-0.6MPa

Fore valve can not be opened

Deficient air pressure

Refer to fault phenomenon 2

Electromagnetic directional valve is not working

Refer to fault phenomenon 2

High vacuum valve can not be opened

Overtravel-limit switch of rough valve is not compacted

Adjust switch and upper cover plate to suitable place

Gas source pressure is not enough

Should be 0.4-0.6MPa

Electromagnetic directional valve

Refer to fault phenomenon 2

Vacuum degree is not enough(Can not reach vacuum meter setting value)

Compound vacuum meter(working) setting value not less than 5Pa

Front valve didn’t open

Open front valve under certain condition

Roots pump didn’t open

Vacuum electric contact pressure gage didn’t touch

Pumping air, make big round meter indicator to the left end

Time-delay is not completed

Wait

Air switch is not connected

Connect switch if no issue

Diffusion pump is not working

Heating time is not enough

KT-400 is 1 hour; KT-600 is 80 minutes

Oil pollution

Change pump oil(Dalian NO.3)

Vacuum rough pumping is not high

Vacuum degree should be higher than 5Pa

Cooling water is not unimpeded

Clean pump cooling water path

Not proper oil volume

Add oil or release oil

Air inflation is not working

Rough valve and high vacuum valve overtravel-limit switch is not compacted

Adjust switch and upper cover plate to suitable place

Electromagnetic charging valve is not working

Change coil or valve

Fan didn’t open

Electro connecting pressure gauge didn’t touch

Wait for inflation pressure to 0.02MPa

Rough valve and high vacuum valve overtravel-limit switch is not compacted

Adjust switch and upper cover plate to suitable place

Air switch is not connected

Connect switch if no issue

Motor is damaged

Fix or change motor

Heating current is not balanced confoundedly

Heating voltage close to rated value, current is 0, heater band is broken

Use molybdenum filament to connect or change heater band

Heater band connected with wall

Use ceramic parts to insulate

Mutual inductor is broken, has voltage, no current

Change mutual inductor

Ammeter and voltmeter is broken

Change meters

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